MEMS: Fundamental Technology and Applications

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Автор: Vikas Choudhary, Krzysztof Iniewski

Название: MEMS: Fundamental Technology and Applications

Издательство: CRC Press

Series: Devices, Circuits, and Systems (Book 15)

Год: 2013

Формат: PDF

Размер: 64.33 MB

Язык: Английский

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The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world.

The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:

Thin-film integrated passives as an alternative to discrete passives

The possibility of piezoelectric MEMS

Solutions for MEMS gyroscopes

Advanced interconnect technologies

Ambient energy harvesting

Bulk acoustic wave resonators

Ultrasonic receiver arrays using MEMS sensors

Optical MEMS-based spectrometers

The integration of MEMS resonators with conventional circuitry

A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns

Wireless microactuators to enable implantable MEMS devices for drug delivery

MEMS technologies for tactile sensing and actuation in robotics

MEMS-based micro hot-plate devices

Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring

Sensors using passive acousto-electric devices in wired and wireless systems

Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.